Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors

Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors

We demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub&g...

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Bibliographic Details
Main Authors: Florentyna Sosada-Ludwikowska, Larissa Egger, Jerome Vernieres, Vidyadhar Singh, Panagiotis Grammatikopoulos, Stephan Steinhauer, Anton Köck
Format: Article
Language:English
Published: MDPI AG 2024-06-01
Series:Proceedings
Subjects:
chemical sensors
multi-gas sensor
CMOS integration
metal oxides
nanoparticles
Online Access:https://www.mdpi.com/2504-3900/97/1/224
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Summary:We demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub> films are integrated on CMOS-based micro-hotplate devices, where each chip contains 16 sensor devices in total. We found that the response of the sensor device can be significantly tuned to specific target gases, such as CO and VOCs, by using various types of NPs.
ISSN:2504-3900

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