Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor

Abstract The development of electronic skin, soft robots, and smart wearables has significantly driven advances in flexible pressure sensing technology. However, traditional multilayer solid-structure flexible pressure sensors encounter challenges at temperatures between 100 °C and 150 °C due to hig...

Full description

Saved in:
Bibliographic Details
Main Authors: Qing Wang, Zhou Zhou, Jizhang He, Liang Zhuo, Chenlin Zhu, Wenjie Qian, Wei Shi, Daoheng Sun
Format: Article
Language:English
Published: Nature Publishing Group 2025-04-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-00915-5
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1850153617753899008
author Qing Wang
Zhou Zhou
Jizhang He
Liang Zhuo
Chenlin Zhu
Wenjie Qian
Wei Shi
Daoheng Sun
author_facet Qing Wang
Zhou Zhou
Jizhang He
Liang Zhuo
Chenlin Zhu
Wenjie Qian
Wei Shi
Daoheng Sun
author_sort Qing Wang
collection DOAJ
description Abstract The development of electronic skin, soft robots, and smart wearables has significantly driven advances in flexible pressure sensing technology. However, traditional multilayer solid-structure flexible pressure sensors encounter challenges at temperatures between 100 °C and 150 °C due to high-temperature modal distortion. Changes in the conductivity of the sensor’s conductive components interfere with accurate pressure measurement. In this research, a flexible pressure sensor with a convective liquid metal sensitive layer is proposed. The sensor uses a cyclic self-cooling mechanism to lower the temperature of its conductive components, reducing the impact of external high temperatures on the pressure measurement accuracy. At a 2.8 W thermal load, the flexible sensor, with liquid metal circulating at 2.0 mL/min, exhibits a sensitivity of 0.11 kPa⁻¹ within the pressure range from 0 to 12.5 kPa, and its maximum measurable pressure is 30 kPa. In addition, the resistance of the sensor is 18.5 mΩ less than that of a stationary liquid metal sensor, representing a 38.1% reduction. The sensor proposed in this research introduces a novel strategy for pressure measurement in high-temperature applications, extending the application scope to aircraft, special robots, and hydraulic oil circuits.
format Article
id doaj-art-04339bb0e9054cedad22061e55f266ef
institution OA Journals
issn 2055-7434
language English
publishDate 2025-04-01
publisher Nature Publishing Group
record_format Article
series Microsystems & Nanoengineering
spelling doaj-art-04339bb0e9054cedad22061e55f266ef2025-08-20T02:25:40ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-04-0111111710.1038/s41378-025-00915-5Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensorQing Wang0Zhou Zhou1Jizhang He2Liang Zhuo3Chenlin Zhu4Wenjie Qian5Wei Shi6Daoheng Sun7School of Mechanical and Automotive Engineering, Anhui Polytechnic UniversitySchool of Mechanical and Automotive Engineering, Anhui Polytechnic UniversitySchool of Mechanical and Automotive Engineering, Anhui Polytechnic UniversityGuizhou Aerospace Linquan Motor Co. LtdCollege of Mechanical and Electrical Engineering, China Jiliang UniversitySchool of Mechanical and Automotive Engineering, Anhui Polytechnic UniversitySchool of Mechanical and Automotive Engineering, Anhui Polytechnic UniversitySchool of Aeronautics and Astronaut, Xiamen UniversityAbstract The development of electronic skin, soft robots, and smart wearables has significantly driven advances in flexible pressure sensing technology. However, traditional multilayer solid-structure flexible pressure sensors encounter challenges at temperatures between 100 °C and 150 °C due to high-temperature modal distortion. Changes in the conductivity of the sensor’s conductive components interfere with accurate pressure measurement. In this research, a flexible pressure sensor with a convective liquid metal sensitive layer is proposed. The sensor uses a cyclic self-cooling mechanism to lower the temperature of its conductive components, reducing the impact of external high temperatures on the pressure measurement accuracy. At a 2.8 W thermal load, the flexible sensor, with liquid metal circulating at 2.0 mL/min, exhibits a sensitivity of 0.11 kPa⁻¹ within the pressure range from 0 to 12.5 kPa, and its maximum measurable pressure is 30 kPa. In addition, the resistance of the sensor is 18.5 mΩ less than that of a stationary liquid metal sensor, representing a 38.1% reduction. The sensor proposed in this research introduces a novel strategy for pressure measurement in high-temperature applications, extending the application scope to aircraft, special robots, and hydraulic oil circuits.https://doi.org/10.1038/s41378-025-00915-5
spellingShingle Qing Wang
Zhou Zhou
Jizhang He
Liang Zhuo
Chenlin Zhu
Wenjie Qian
Wei Shi
Daoheng Sun
Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
Microsystems & Nanoengineering
title Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
title_full Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
title_fullStr Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
title_full_unstemmed Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
title_short Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
title_sort multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor
url https://doi.org/10.1038/s41378-025-00915-5
work_keys_str_mv AT qingwang multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT zhouzhou multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT jizhanghe multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT liangzhuo multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT chenlinzhu multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT wenjieqian multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT weishi multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor
AT daohengsun multimodalresponsecharacteristicsofconvectiveliquidmetalsensitivelayersinflexiblepressuresensor