Oxygen reservoir effect of Tungsten trioxide electrode on endurance performance of ferroelectric capacitors for FeRAM applications

Oxygen reservoir effect of Tungsten trioxide electrode on endurance performance of ferroelectric capacitors for FeRAM applications

Abstract The effect of W and WO3 electrodes on the ferroelectric characteristics of HZO (Zr-doped HfO2)-based MFM (metal-ferroelectric-metal) capacitors was investigated. During the deposition of tungsten, the W electrode was formed using only Ar gas, while the WO3 electrode was formed using a mixtu...

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Bibliographic Details
Main Authors: Yejoo Choi, Jaemin Shin, Jinhong Min, Seungjun Moon, Daeyoung Chu, Donghwan Han, Changhwan Shin
Format: Article
Language:English
Published: Nature Portfolio 2024-11-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-024-80523-x
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