Separation Process of Polydisperse Particles in the Plasma of Radio-frequency Discharge

Method of separation of polydisperse particles in the plasma of radio-frequency (RF) discharge is considered. Investigation of plasma equipotential field gave conditions for separation. The purpose of this work was an obtaining of monodisperse particles in the plasma of RF discharge. Samples of mono...

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Bibliographic Details
Main Authors: D.G. Batryshev, T.S. Ramazanov, M.K. Dosbolayev, M.T. Gabdullin
Format: Article
Language:English
Published: Sumy State University 2014-07-01
Series:Журнал нано- та електронної фізики
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Online Access:http://jnep.sumdu.edu.ua/download/numbers/2014/3/articles/jnep_2014_V6_03032.pdf
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Summary:Method of separation of polydisperse particles in the plasma of radio-frequency (RF) discharge is considered. Investigation of plasma equipotential field gave conditions for separation. The purpose of this work was an obtaining of monodisperse particles in the plasma of RF discharge. Samples of monodisperse microparticles of silica and alumina were obtained. The size and chemical composition of samples were studied on a scanning electron microscope Quanta 3D 200i (SEM, USA FEI company). Average size of separated silica nanoparticles is 600 nm, silica and alumina microparticles is 5 mkm.
ISSN:2077-6772