Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation

In this paper, the charge state distributions of extreme ultraviolet (EUV) light source plasmas produced by near-infrared-wavelength lasers are systematically characterized. The spatiotemporal properties of laser-irradiated planar tin targets are examined using radiation-hydrodynamic simulations and...

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Main Authors: Jang Hyeob Sohn, Hyun-Kyung Chung, Hyungyu Yu, Inki Jeong, Sang June Hahn, Young-Gui Yoon, Hyyong Suk, Byoung Ick Cho
Format: Article
Language:English
Published: Elsevier 2025-08-01
Series:Results in Physics
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Online Access:http://www.sciencedirect.com/science/article/pii/S2211379725002347
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author Jang Hyeob Sohn
Hyun-Kyung Chung
Hyungyu Yu
Inki Jeong
Sang June Hahn
Young-Gui Yoon
Hyyong Suk
Byoung Ick Cho
author_facet Jang Hyeob Sohn
Hyun-Kyung Chung
Hyungyu Yu
Inki Jeong
Sang June Hahn
Young-Gui Yoon
Hyyong Suk
Byoung Ick Cho
author_sort Jang Hyeob Sohn
collection DOAJ
description In this paper, the charge state distributions of extreme ultraviolet (EUV) light source plasmas produced by near-infrared-wavelength lasers are systematically characterized. The spatiotemporal properties of laser-irradiated planar tin targets are examined using radiation-hydrodynamic simulations and non-local thermodynamic equilibrium calculations. Focusing on the distributions of Sn11+–Sn14+ ions, which are primarily responsible for “in-band” EUV emissions, a mean charge state of 12.5 is identified as the optimal ionization level for efficient EUV generation. This prediction is consistent with the experimental observation by Behnke et al. (2021) of short-wavelength spectra in the 7–10 nm range, where the contributions of the Sn11+–Sn14+ ions are well identified. Simulations further reveal that spatially and temporally uniform pulses more efficiently achieve the optimal mean charge state, producing up to 45 % more Sn11+–Sn14+ ions than Gaussian pulses of the same energy. These findings provide foundational insights for advancing laser-driven EUV light sources for industrial applications.
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institution DOAJ
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publisher Elsevier
record_format Article
series Results in Physics
spelling doaj-art-01e22f5051844b5b8fcda19786e449742025-08-20T03:23:29ZengElsevierResults in Physics2211-37972025-08-017510834010.1016/j.rinp.2025.108340Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generationJang Hyeob Sohn0Hyun-Kyung Chung1Hyungyu Yu2Inki Jeong3Sang June Hahn4Young-Gui Yoon5Hyyong Suk6Byoung Ick Cho7Department of Physics and Photon Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, South KoreaKorea Institute of Fusion Energy (KFE), Daejeon 34133, South KoreaDepartment of Physics and Photon Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, South KoreaDepartment of Physics, Chung-Ang University, Seoul 06974, South KoreaDepartment of Physics, Chung-Ang University, Seoul 06974, South KoreaDepartment of Physics, Chung-Ang University, Seoul 06974, South KoreaDepartment of Physics and Photon Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, South KoreaDepartment of Physics and Photon Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, South Korea; Center for Relativistic Laser Science, Institute for Basic Science (IBS), Gwangju 61005, South Korea; Corresponding author.In this paper, the charge state distributions of extreme ultraviolet (EUV) light source plasmas produced by near-infrared-wavelength lasers are systematically characterized. The spatiotemporal properties of laser-irradiated planar tin targets are examined using radiation-hydrodynamic simulations and non-local thermodynamic equilibrium calculations. Focusing on the distributions of Sn11+–Sn14+ ions, which are primarily responsible for “in-band” EUV emissions, a mean charge state of 12.5 is identified as the optimal ionization level for efficient EUV generation. This prediction is consistent with the experimental observation by Behnke et al. (2021) of short-wavelength spectra in the 7–10 nm range, where the contributions of the Sn11+–Sn14+ ions are well identified. Simulations further reveal that spatially and temporally uniform pulses more efficiently achieve the optimal mean charge state, producing up to 45 % more Sn11+–Sn14+ ions than Gaussian pulses of the same energy. These findings provide foundational insights for advancing laser-driven EUV light sources for industrial applications.http://www.sciencedirect.com/science/article/pii/S2211379725002347EUV light sourceLaser-produced plasmaCharge state distribution
spellingShingle Jang Hyeob Sohn
Hyun-Kyung Chung
Hyungyu Yu
Inki Jeong
Sang June Hahn
Young-Gui Yoon
Hyyong Suk
Byoung Ick Cho
Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation
Results in Physics
EUV light source
Laser-produced plasma
Charge state distribution
title Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation
title_full Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation
title_fullStr Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation
title_full_unstemmed Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation
title_short Characterization of charge state distributions in Near-Infrared Laser-Driven tin plasmas for efficient EUV generation
title_sort characterization of charge state distributions in near infrared laser driven tin plasmas for efficient euv generation
topic EUV light source
Laser-produced plasma
Charge state distribution
url http://www.sciencedirect.com/science/article/pii/S2211379725002347
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