Control of a quasi-static MEMS Mirror for raster scanning projection applications
The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for imp...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2024-12-01
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| Series: | International Journal of Optomechatronics |
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| Online Access: | https://www.tandfonline.com/doi/10.1080/15599612.2024.2386991 |
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| author | Riccardo Antonello Roberto Oboe Daniele D’Elia Luca Molinari |
| author_facet | Riccardo Antonello Roberto Oboe Daniele D’Elia Luca Molinari |
| author_sort | Riccardo Antonello |
| collection | DOAJ |
| description | The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for improving the linearity of the trace motion, and hence the image brightness. It includes a feedforward action to achieve the required tracking performance under nominal conditions, and a feedback control for robustness against disturbances and other nonidealities. Notch filtering prevents resonance-induced ringing. The simplicity of the architecture enables an easy implementation on FPGA or ASIC. Experimental tests carried out on two different micromirrors with Lead-Zirconate-Titanate (PZT) piezoelectric actuation and piezoresistive sensing demonstrate an average linearity of [Formula: see text] and reproducibility of [Formula: see text] for sawtooth reference trajectories with up to [Formula: see text] amplitude and 120 Hz frequency, thus meeting the performance requirements mandated by the standards for high-resolutions projection applications. |
| format | Article |
| id | doaj-art-01316b7a54904dd4b955c2bc6c41bbe0 |
| institution | DOAJ |
| issn | 1559-9612 1559-9620 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | International Journal of Optomechatronics |
| spelling | doaj-art-01316b7a54904dd4b955c2bc6c41bbe02025-08-20T02:49:50ZengTaylor & Francis GroupInternational Journal of Optomechatronics1559-96121559-96202024-12-0118110.1080/15599612.2024.2386991Control of a quasi-static MEMS Mirror for raster scanning projection applicationsRiccardo Antonello0Roberto Oboe1Daniele D’Elia2Luca Molinari3Department of Management and Engineering, University of Padova, Vicenza, ItalyDepartment of Management and Engineering, University of Padova, Vicenza, ItalyMEMS and Sensor Group, STMicroelectronics, ItalyMEMS and Sensor Group, STMicroelectronics, ItalyThe angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for improving the linearity of the trace motion, and hence the image brightness. It includes a feedforward action to achieve the required tracking performance under nominal conditions, and a feedback control for robustness against disturbances and other nonidealities. Notch filtering prevents resonance-induced ringing. The simplicity of the architecture enables an easy implementation on FPGA or ASIC. Experimental tests carried out on two different micromirrors with Lead-Zirconate-Titanate (PZT) piezoelectric actuation and piezoresistive sensing demonstrate an average linearity of [Formula: see text] and reproducibility of [Formula: see text] for sawtooth reference trajectories with up to [Formula: see text] amplitude and 120 Hz frequency, thus meeting the performance requirements mandated by the standards for high-resolutions projection applications.https://www.tandfonline.com/doi/10.1080/15599612.2024.2386991MEMS micromirrorslaser beam raster scanning systemstracking control loopspiezoelectric actuationpiezoresistive sensing |
| spellingShingle | Riccardo Antonello Roberto Oboe Daniele D’Elia Luca Molinari Control of a quasi-static MEMS Mirror for raster scanning projection applications International Journal of Optomechatronics MEMS micromirrors laser beam raster scanning systems tracking control loops piezoelectric actuation piezoresistive sensing |
| title | Control of a quasi-static MEMS Mirror for raster scanning projection applications |
| title_full | Control of a quasi-static MEMS Mirror for raster scanning projection applications |
| title_fullStr | Control of a quasi-static MEMS Mirror for raster scanning projection applications |
| title_full_unstemmed | Control of a quasi-static MEMS Mirror for raster scanning projection applications |
| title_short | Control of a quasi-static MEMS Mirror for raster scanning projection applications |
| title_sort | control of a quasi static mems mirror for raster scanning projection applications |
| topic | MEMS micromirrors laser beam raster scanning systems tracking control loops piezoelectric actuation piezoresistive sensing |
| url | https://www.tandfonline.com/doi/10.1080/15599612.2024.2386991 |
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