Formation of Biphasic State in Vacuum-Arc Coatings Obtained by Evaporation of Ti-Al-Zr-Nb-Y Alloy in the Atmosphere of Nitrogen
By means of X-ray diffraction, transmission and scanning electron microscopy, energy dispersive spectroscopy and indentation methods, the effect of nitrogen atmosphere pressure on composition, structure and hardness of vacuum-arc (Ti-Al-Zr-Nb-Y)N coatings during the deposition process has been studi...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2014-04-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2014/1/articles/jnep_2014_V6_01030.pdf |
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