Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm

Diamond‐based subwavelength antireflective microstructures are corrosion resistant, impact resistant, and possess high transmittance, thereby presenting broad application prospects in special optical windows. Nevertheless, fabricating uniform and highly transmissive subwavelength antireflective micr...

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Main Authors: He Cao, Yun‐Fei Li, Gong Wang, Hong‐Yu Li, De‐Rong Sun, Zi‐Qi Tang, Li‐Fang Li, Zhong‐Shan Jin, Yu Yu, Xue‐Qing Liu, Yu‐Lei Wang, Zhi‐Wei Lv, Qi‐Dai Chen
Format: Article
Language:English
Published: Wiley-VCH 2025-06-01
Series:Small Structures
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Online Access:https://doi.org/10.1002/sstr.202400590
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author He Cao
Yun‐Fei Li
Gong Wang
Hong‐Yu Li
De‐Rong Sun
Zi‐Qi Tang
Li‐Fang Li
Zhong‐Shan Jin
Yu Yu
Xue‐Qing Liu
Yu‐Lei Wang
Zhi‐Wei Lv
Qi‐Dai Chen
author_facet He Cao
Yun‐Fei Li
Gong Wang
Hong‐Yu Li
De‐Rong Sun
Zi‐Qi Tang
Li‐Fang Li
Zhong‐Shan Jin
Yu Yu
Xue‐Qing Liu
Yu‐Lei Wang
Zhi‐Wei Lv
Qi‐Dai Chen
author_sort He Cao
collection DOAJ
description Diamond‐based subwavelength antireflective microstructures are corrosion resistant, impact resistant, and possess high transmittance, thereby presenting broad application prospects in special optical windows. Nevertheless, fabricating uniform and highly transmissive subwavelength antireflective microstructures on diamond surfaces poses a significant challenge. The hard and brittle properties of diamond result in a large number of chips and particles, adhering to the surfaces during processing, which subsequently impacts the subsequent processing. Herein, a laser cleaning‐assisted femtosecond laser direct‐write processing technology is reported for fabricating subwavelength antireflective microstructures on diamond. To effectively avert the effects of chip accumulation, an elliptical laser spot is employed to clear the chips and polish the microstructure surface. The resulting highquality midinfrared antireflective microstructures are fabricated on diamond, and high transmittance (94.5%, with a 24.4% increase at 10 μm) within a broadband range (10–12 μm) is obtained, which represents the best results without antireflective coatings to the best of knowledge. Moreover, the antireflective structure possesses no significant angular dependence and maintains good working efficiency even at high temperature.
format Article
id doaj-art-0008d7acb10742bb9de7b06e71dc26a0
institution Kabale University
issn 2688-4062
language English
publishDate 2025-06-01
publisher Wiley-VCH
record_format Article
series Small Structures
spelling doaj-art-0008d7acb10742bb9de7b06e71dc26a02025-08-20T03:26:00ZengWiley-VCHSmall Structures2688-40622025-06-0166n/an/a10.1002/sstr.202400590Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μmHe Cao0Yun‐Fei Li1Gong Wang2Hong‐Yu Li3De‐Rong Sun4Zi‐Qi Tang5Li‐Fang Li6Zhong‐Shan Jin7Yu Yu8Xue‐Qing Liu9Yu‐Lei Wang10Zhi‐Wei Lv11Qi‐Dai Chen12Center for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaState Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University Changchun 130012 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaState Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University Changchun 130012 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaCenter for Advanced Laser Technology Hebei University of Technology Tianjin 300401 ChinaState Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University Changchun 130012 ChinaDiamond‐based subwavelength antireflective microstructures are corrosion resistant, impact resistant, and possess high transmittance, thereby presenting broad application prospects in special optical windows. Nevertheless, fabricating uniform and highly transmissive subwavelength antireflective microstructures on diamond surfaces poses a significant challenge. The hard and brittle properties of diamond result in a large number of chips and particles, adhering to the surfaces during processing, which subsequently impacts the subsequent processing. Herein, a laser cleaning‐assisted femtosecond laser direct‐write processing technology is reported for fabricating subwavelength antireflective microstructures on diamond. To effectively avert the effects of chip accumulation, an elliptical laser spot is employed to clear the chips and polish the microstructure surface. The resulting highquality midinfrared antireflective microstructures are fabricated on diamond, and high transmittance (94.5%, with a 24.4% increase at 10 μm) within a broadband range (10–12 μm) is obtained, which represents the best results without antireflective coatings to the best of knowledge. Moreover, the antireflective structure possesses no significant angular dependence and maintains good working efficiency even at high temperature.https://doi.org/10.1002/sstr.202400590antireflectionsdiamondsfemtosecond lasersmicrostructures optical windows
spellingShingle He Cao
Yun‐Fei Li
Gong Wang
Hong‐Yu Li
De‐Rong Sun
Zi‐Qi Tang
Li‐Fang Li
Zhong‐Shan Jin
Yu Yu
Xue‐Qing Liu
Yu‐Lei Wang
Zhi‐Wei Lv
Qi‐Dai Chen
Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm
Small Structures
antireflections
diamonds
femtosecond lasers
microstructures optical windows
title Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm
title_full Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm
title_fullStr Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm
title_full_unstemmed Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm
title_short Laser Cleaning‐Assisted Femtosecond Laser Direct Writing of Diamond Antireflective Microstructures with Superhigh Transmittance of 94.5% at 10.6 μm
title_sort laser cleaning assisted femtosecond laser direct writing of diamond antireflective microstructures with superhigh transmittance of 94 5 at 10 6 μm
topic antireflections
diamonds
femtosecond lasers
microstructures optical windows
url https://doi.org/10.1002/sstr.202400590
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