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    A Review on Reactor Design and Surface Modification of Atomic Layer Deposition for Functional Nanoparticles

    A Review on Reactor Design and Surface Modification of Atomic Layer Deposition for Functional Nanoparticles by Guanghui Yan, Gaoshan Huang, Jianjun Shi, Yi Ouyang, Xueqin Zuo, Zhihao Bao, Yongfeng Mei

    Published 2025-07-01
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