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    A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links

    A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links by Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu

    Published 2025-04-01
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