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Fully Transparent Epitaxial Oxide Thin‐Film Transistor Fabricated at Back‐End‐of‐Line Temperature by Suboxide Molecular‐Beam Epitaxy by Felix V.E. Hensling, Patrick Vogt, Jisung Park, Shun‐Li Shang, Huacheng Ye, Yu‐Mi Wu, Kathleen Smith, Veronica Show, Kathy Azizie, Hanjong Paik, Debdeep Jena, Huili G. Xing, Y. Eren Suyolcu, Peter A. van Aken, Suman Datta, Zi‐Kui Liu, Darrell G. Schlom
Published 2025-03-01Get full text
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