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    The influence of if discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films

    The influence of if discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films by V. V. Hladkovskiy, E. G. Kostin, B. P. Polozov, O. A. Fedorovich, V. A. Petriakov

    Published 2014-12-01
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