Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory by Sunhong Jun, Inkeun Baek, Suhwan Park, Eun Hyuk Choi, Jongmin Yoon, Iksun Jeon, Yoonkyung Jang, Martin Priwisch, Wontae Kim, Suncheul Kim, Taejoong Kim, Taeyong Jo, Myungjun Lee, Sungyoon Ryu, Namil Koo, Yusin Yang

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