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Control of Integrated Circuits Crystals' Surface Microrelief and Defects of Heteroand Submicrostructures by the Atomic Force Microscopy Method by V. A. Lapitskaya, S. A. Chizhik, E. V. Lutsenko, J. A. Solovjov, A. A. Nasevich, K. S. Liutsko, T. V. Petlitskaya, V. B. Makarevich, Yu. Guangbin
Published 2024-12-01Get full text
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