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  1. 1
    Chemical Etching of {hk0} Silicon Plates in EDP Part I: Experiments and Comparison with TMAH

    Chemical Etching of {hk0} Silicon Plates in EDP Part I: Experiments and Comparison with TMAH by C. R. Tellier, T. G. Leblois, A. Charbonnieras

    Published 2000-01-01
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  2. 2
    Some Investigations on the Anisotropy of the Chemical Etching of (h k 0) and (h h I) Silicon Plates in a NaOH 35% Solution. Part III: Determination of a Database for the Simulator Tensosim and Prediction of 2D Etching Shapes

    Some Investigations on the Anisotropy of the Chemical Etching of (h k 0) and (h h I) Silicon Plates in a NaOH 35% Solution. Part III: Determination of a Database for the Simulator... by C. R. Telliera, C. Hodebourg, T. G. Leblois

    Published 2003-01-01
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