GAN-Based Super-Resolution in Linear R-SAM Imaging for Enhanced Non-Destructive Semiconductor Measurement by Thi Thu Ha Vu, Tan Hung Vo, Trong Nhan Nguyen, Jaeyeop Choi, Le Hai Tran, Vu Hoang Minh Doan, Van Bang Nguyen, Wonjo Lee, Sudip Mondal, Junghwan Oh

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