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    An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing

    An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing by Belkner Johannes, Leineweber Johannes, Hein Georg, Stauffenberg Jaqueline, Barth Alexander, Kissinger Thomas, Manske Eberhard, Fröhlich Thomas

    Published 2025-01-01
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