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  1. 1
    Control of local stress in semiconductor silicon structures

    Control of local stress in semiconductor silicon structures by S. F. Sianko, V. A. Zelenin

    Published 2018-09-01
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  2. 2
    ESTIMATION OF TOPOGRAPHIC DEFECTS DIMENSIONS OF SEMICONDUCTOR SILICON STRUCTURES

    ESTIMATION OF TOPOGRAPHIC DEFECTS DIMENSIONS OF SEMICONDUCTOR SILICON STRUCTURES by S. F. Sianko, V. A. Zelenin

    Published 2018-03-01
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