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  1. 1
    Development platform for UV-NIL processes using polymer masters produced by laser ablation and photolithography

    Development platform for UV-NIL processes using polymer masters produced by laser ablation and photolithography by Joachim Zajadacz, Pierre Lorenz, Martin Ehrhardt, Klaus Zimmer

    Published 2025-06-01
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  2. 2
    Transfer of photolithographic patterns by excimer laser ablation of polymers

    Transfer of photolithographic patterns by excimer laser ablation of polymers by Klaus Zimmer, Joachim Zajadacz, Martin Ehrhardt, Pierre Lorenz, Tamás Smausz, Béla Hopp

    Published 2025-06-01
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