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    Design and fabrication of the trapezoidal electrostatic comb-drive actuator

    Design and fabrication of the trapezoidal electrostatic comb-drive actuator by Pham Hong Phuc, Dinh Khac Toan, Dang Bao Lam, Nguyen Tuan Khoa, Nguyen Tien Dung

    Published 2012-11-01
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