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    Ultra-Thin Al<sub>2</sub>O<sub>3</sub> Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors

    Ultra-Thin Al<sub>2</sub>O<sub>3</sub> Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors by Shiwei Sun, Dinghao Ma, Boxi Ye, Guanshun Liu, Nanting Luo, Hao Huang

    Published 2025-04-01
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