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    Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering

    Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering by Tai Nguyen, Anirban Ghosh, Thang Duy Dao, Maja Koblar, Goran Drazic, Nikolai Andrianov, Iurii Nesterenko, Sanjay Nayak, Joaquin Miranda, Andreja Bencan Golob, Mohssen Moridi, Marco Deluca

    Published 2025-06-01
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