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    Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering

    Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering by Oleg Gorshkov, Ivan Antonov, Dmitry Filatov, Maria Shenina, Alexander Kasatkin, Alexander Bobrov, Maria Koryazhkina, Irina Korotaeva, Mikhail Kudryashov

    Published 2017-01-01
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