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Research on application of diamond FAT for black lithium tantalate wafer processing based on nanoindentation and scratch techniques by Linlin Cao, Zhijie Huang, Zhanshuo Zhang, Wei Wei, Tingting Cai, Xiaolong Zhou, Chengyu Sun, Julong Yuan, Wei Hang, Huiying Ni, Yingjie Wang
Published 2025-02-01Get full text
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