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    Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

    Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition by Shuzheng Shi, Shuo Qian, Xiaojuan Hou, Jiliang Mu, Jian He, Xiujian Chou

    Published 2018-01-01
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