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    Temperature-modulated crystallographic orientation and electrical properties of BiFeO3 thick films sputtered on LaNiO3/Pt/Ti/SiO2/Si for piezo-MEMS applications

    Temperature-modulated crystallographic orientation and electrical properties of BiFeO3 thick films sputtered on LaNiO3/Pt/Ti/SiO2/Si for piezo-MEMS applications by Hongyu Luo, Miaomiao Niu, Hanfei Zhu, Li Li, Hongbo Cheng, Chao Liu, Jianting Li, Yuyao Zhao, Chenxi Zhang, Xiaojie Cao, Isaku Kanno, Qingguo Chi, Jun Ouyang

    Published 2024-12-01
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