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    Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments

    Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments by A. Paolone, M. Bazzan, G. Favaro, F. Borondics, G. Nemeth, F. Capitani, S. Swaraj, R. Belkhou, R. Flammini, J. Teillon, C. Michel, D. Hofman, M. Granata

    Published 2025-01-01
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