Showing 1 - 2 results of 2 for search 'Inkeun Baek', query time: 0.20s Refine Results
  1. 1
    Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy

    Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy by Fumikazu Murakami, Shinji Ueyama, Kenji Suzuki, Ingi Kim, Inkeun Baek, Sangwoo Bae, Dougyong Sung, Myungjun Lee, Sungyoon Ryu, Yusin Yang, Masayoshi Tonouchi

    Published 2025-06-01
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  2. 2
    Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory

    Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory by Sunhong Jun, Inkeun Baek, Suhwan Park, Eun Hyuk Choi, Jongmin Yoon, Iksun Jeon, Yoonkyung Jang, Martin Priwisch, Wontae Kim, Suncheul Kim, Taejoong Kim, Taeyong Jo, Myungjun Lee, Sungyoon Ryu, Namil Koo, Yusin Yang

    Published 2025-02-01
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