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    Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS

    Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS by I. A. Afinogenov, I. A. Zeltser, E. B. Trunin, A. Tolstoguzov

    Published 2015-01-01
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