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    Systematic investigation of AlGaN channels on AlN/sapphire substrates using metal–organic chemical vapor deposition (MOCVD): Toward higher crystallinity and lower surface roughness

    Systematic investigation of AlGaN channels on AlN/sapphire substrates using metal–organic chemical vapor deposition (MOCVD): Toward higher crystallinity and lower surface roughness... by Hadi Sena, Matti Lawton Siukola Thurston, Chuanzhe Meng, Srabanti Chowdhury

    Published 2025-05-01
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