Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process by Yingying Li, Simon J. Bleiker, Elliott Worsey, Maël Dagon, Pierre Edinger, Alain Yuji Takabayashi, Niels Quack, Peter Verheyen, Wim Bogaerts, Kristinn B. Gylfason, Dinesh Pamunuwa, Frank Niklaus

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