Showing 1 - 2 results of 2 for search 'Feiyang Ou', query time: 0.01s Refine Results
  1. 1
    Industrial data-driven machine learning soft sensing for optimal operation of etching tools

    Industrial data-driven machine learning soft sensing for optimal operation of etching tools by Feiyang Ou, Henrik Wang, Chao Zhang, Matthew Tom, Sthitie Bom, James F. Davis, Panagiotis D. Christofides

    Published 2024-12-01
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  2. 2
    Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metrology in semiconductor wafer and slider production

    Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metrology in semiconductor wafer and slider production by Feiyang Ou, Julius Suherman, Chao Zhang, Henrik Wang, Sthitie Bom, James F. Davis, Panagiotis D. Christofides

    Published 2025-06-01
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