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    Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

    Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass by Dong‐Joon Won, Myoung Huh, Sangmin Lee, Usung Park, Dongwoo Yoo, Joonwon Kim

    Published 2020-06-01
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