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    Synthesis Conditions and Properties of SiAlCN Coatings Obtained by Reactive Evaporation of Al in a Hollow Cathode Arc Discharge in Hexamethyldisilazane Vapors

    Synthesis Conditions and Properties of SiAlCN Coatings Obtained by Reactive Evaporation of Al in a Hollow Cathode Arc Discharge in Hexamethyldisilazane Vapors by Andrey Menshakov, Yulia Bryuhanova, Ivan Zhidkov, Daniil Emlin, Polina Skorynina

    Published 2025-04-01
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