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    Progress in the Sputtering Preparation of Hf0.5Zr0.5O2 Ferroelectric Films and Memories

    Progress in the Sputtering Preparation of Hf0.5Zr0.5O2 Ferroelectric Films and Memories by Kun Chen, Dan Zheng, Jie Gao, Hao Wang, Baoyuan Wang

    Published 2025-02-01
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