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Surface patterning of wide-gap semiconducting β-Ga2O3 thin films by area selective crystallization via room-temperature excimer laser annealing and low-toxic wet etching processes by Daishi Shiojiri, Ryoya Kai, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
Published 2025-01-01
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Selective phase growth of ultra-smooth Ti2O3 and TiO2 thin films at low growth temperature controlled by the oxygen partial pressure by Jiayi Tang, Okkyun Seo, Jaemyung Kim, Ibrahima Gueye, L.S.R. Kumara, Ho Jun Oh, Wan-Gil Jung, Won-Jin Moon, Yong Tae Kim, Satoshi Yasuno, Tappei Nishihara, Akifumi Matsuda, Osami Sakata
Published 2025-03-01
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