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    The effect of hydrogen ion bombardment on the capping layers of extreme ultraviolet mirrors

    The effect of hydrogen ion bombardment on the capping layers of extreme ultraviolet mirrors by Kuan-Wei Lu, Kuan-Yu Ko, Ai-Ling Shih, Duy Thanh Cu, Meng-Chi Li, Chien-Cheng Kuo

    Published 2025-01-01
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