Showing 1 - 2 results of 2 for search 'A. N. Petlitsky', query time: 0.01s Refine Results
  1. 1
    METHOD AND CONTROL SET-UP OF SILICON WAFER FLATNESS

    METHOD AND CONTROL SET-UP OF SILICON WAFER FLATNESS by V. A. Pilipenko, A. N. Petlitsky, V. A. Gorushko, S. V. Shvedov, V. V. Ponaryadov

    Published 2015-04-01
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  2. 2
    STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL

    STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL by R. I. Vorobey, O. K. Gusev, A. L. Zharin, A. N. Petlitsky, V. A. Pilipenko, A. S. Turtsevitch, A. K. Tyavlovsky, K. L. Tyavlovsky

    Published 2015-03-01
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