Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst

Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst

We investigate the elongated modifications resulting from a Bessel beam-shaped femtosecond laser in fused silica under three different operation modes, i.e., the single-pulse, MHz-burst, and GHz-burst regimes. The single-pulse and MHz-burst regimes show rather similar behavior in glass, featuring el...

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Bibliographic Details
Main Authors: Théo Guilberteau, Pierre Balage, Manon Lafargue, John Lopez, Laura Gemini, Inka Manek-Hönninger
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Micromachines
Subjects:
Bessel beam
GHz-burst mode
laser processing
dielectrics
chemical etching
laser drilling
Online Access:https://www.mdpi.com/2072-666X/15/11/1313
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