Research on Abnormal State Detection of CZ Silicon Single Crystal Based on Multimodal Fusion
The Czochralski method is the primary technique for single-crystal silicon production. However, anomalous states such as crystal loss, twisting, swinging, and squareness frequently occur during crystal growth, adversely affecting product quality and production efficiency. To address this challenge,...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/21/6819 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|